Patent Assignment
Reel/Frame 056092/0651
Assignment of Assignor's Interest
Recorded: 2021-04-29
Pages: 2
Assignee
SK SILTRON CO., LTD.
53 IMSU-RO, GUMI-SI, GYEONGSANGBUK-DO, 39386, KOREA, REPUBLIC OF
Covered Property
(1)
Wafer Cassette Stocker and Wafer Cassette Drying Method Using the Same