Wafer cassette stocker and wafer cassette drying method using the same
An embodiment provides a wafer cassette stoker comprising: a cassette on which a plurality of wafers are loaded; a plurality of chambers disposed in one line while forming at least one layer, wherein the cassette after being cleaned is inserted in each of the chambers and a humidity control unit for supplying a compressed dry air (CDA) into the insides of the chambers so as to control humidity of the cassette.
1. A wafer cassette stocker comprising:
cassettes each capable of stocking a plurality of wafers therein;
a plurality of chambers disposed in a line while forming at least one story, the chambers receiving the cassettes therein after cleaning of the cassettes; and
a humidity controller for supplying compressed dry air (CDA) to interiors of the chambers, thereby controlling humidity of the cassettes,
wherein the humidity controller includes a compressed air generator configured to generate the compressed dry air, supply lines configured to connect the compressed air generator to an upper side of the chambers, a discharge line connected to a lower side of the chambers, and a thermo-hygrometer, in which a thermometer and a hygrometer are integrated, is installed at a lower side of at least one of the chambers, and
wherein a filter is mounted to at least one of the supply lines.
2. The wafer cassette stocker according to claim 1 , wherein the humidity controller includes:
a heater installed between two of the supply lines.
3. The wafer cassette stocker according to claim 1 , wherein the humidity controller includes:
an upper panel formed with a plurality of through holes to guide compressed dry air introduced therein from the supply lines to flow toward a lower side of the cassettes, and the upper panel being disposed at an inner upper side of the chambers.
4. The wafer cassette stocker according to claim 3 , wherein the humidity controller includes:
a lower panel formed with a plurality of through holes to guide the compressed dry air to flow toward the discharge line, the lower panel being disposed at an inner lower side of the chambers to support the cassettes.
5. The wafer cassette stocker according to claim 4 , wherein the plurality of through holes formed at the upper panel are disposed to have sizes such that areas of the through holes gradually increase with increasing distance from one of the supply lines, and the plurality of through holes formed at the lower panel are disposed to have sizes such that areas of the through holes gradually increase with increasing distance from the discharge line.
6. A wafer cassette stocker comprising:
a stocker that includes a first chamber, and a second chamber disposed over the first chamber;
a first cassette received in the first chamber;
a second cassette received in the second chamber;
a central panel installed within the stocker to partition the first chamber and the second chamber while supporting the second cassette, and the central panel being formed with a plurality of central through holes; and
a humidity controller configured to provide compressed dry air to an interior of the stocker, thereby removing moisture of the first cassette and the second cassette,
wherein the humidity controller includes a compressed air generator configured to generate the compressed dry air, supply lines to connect the compressed air generator to an upper side of the second chamber, a discharge line to connect to a lower side of the first chamber, a heater installed between two of the supply lines, and a thermo-hygrometer, in which a thermometer and a hygrometer are integrated, installed at a lower side of at least one of the chambers, and
wherein a filter is mounted to at least one of the supply lines.
7. The wafer cassette stocker according to claim 6 , wherein the humidity controller includes:
an upper panel formed with a plurality of through holes to guide compressed dry air introduced therein from the supply lines to flow therethrough, the upper panel being disposed at an inner upper side of the second chamber; and
a lower panel formed with a plurality of through holes to guide the compressed dry air to flow toward the discharge line, the lower panel being disposed at an inner lower side of the first chamber to support the first cassette.
8. The wafer cassette stocker according to claim 7 , wherein the plurality of through holes formed at the upper panel are disposed to have sizes such that areas of the through holes gradually increase with increasing distance from one of the supply lines, and the plurality of through holes formed at the lower panel are disposed to have sizes such that areas of the through holes gradually increase with increasing distance from the discharge line.
9. The wafer cassette stocker according to claim 6 , wherein the central through holes formed at the central panel are configured to have a same size.