Patent Assignment
Reel/Frame 056174/0896
Assignment of Assignor's Interest
Recorded: 2021-05-07
Pages: 4
Assignors
KIM, BONGSEONG
Executed: 2021-04-27
INOUE, MASAHIRO
Executed: 2021-04-23
OHATA, MITSUNORI
Executed: 2021-04-23
KOBAYASHI, KEN
Executed: 2021-04-23
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus