Patent Assignment
Reel/Frame 056179/0189
Assignment of Assignor's Interest
Recorded: 2021-05-08
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Methods for Reduction of Photoresist Defect