Patent Assignment
Reel/Frame 056200/0414
Assignment of Assignor's Interest
Recorded: 2021-05-11
Pages: 16
Assignor
YAN, CHUN
Executed: 2018-01-15
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Processing of Workpieces Using Flourocarbon Plasma
Application:
63/002,571 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 5, 2021
From: WANG, SHANYU
To: MATTSON TECHNOLOGIES, INC.
Reel/Frame 055157/0400 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →