IP Library › Patent Application 63002571
Patent Application Provisional
App. No. 63/002,571 · Confirmation No. 6599

Processing of Workpieces Using Flourocarbon Plasma

Inventors: Shanyu Wang, Chun Yan
Provisional Application Expired
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2021-06-25 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2020-04-28 APP.FILE.REC Filing Receipt 3 View
2020-03-31 PA.. Power of Attorney 2 View
2020-03-31 ADS Application Data Sheet 8 View
2020-03-31 SPEC Specification 21 View
2020-03-31 CLM Claims 5 View
2020-03-31 ABST Abstract 1 View
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2020-03-31 WFEE Fee Worksheet (SB06) 2 View
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2020-03-31 136A Authorization for Extension of Time all replies 1 View
2020-03-31 TRAN.LET Transmittal Letter 1 View
2020-03-31 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2020-03-31 PA.. Power of Attorney 1 View
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Quick Facts
App. No.
63/002,571
Filed
2020-03-31