Patent Assignment
Reel/Frame 056225/0178
Assignment of Assignor's Interest
Recorded: 2021-05-12
Pages: 3
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31040, KOREA, REPUBLIC OF
Covered Property
(1)
Electrostatic Chuck, Substrate Processing Apparatus, and Substrate Processing Method