Patent Assignment
Reel/Frame 056227/0838
Assignment of Assignor's Interest
Recorded: 2021-05-13
Pages: 3
Assignor
TAPILY, KANDABARA
Executed: 2021-05-13
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Reducing Lateral Film Formation in Area Selective Deposition