Patent Assignment
Reel/Frame 056252/0263
Assignment of Assignor's Interest
Recorded: 2021-05-14
Pages: 3
Assignors
CHEN, LEE-CHUN
Executed: 2021-04-15
YANG, YI-CHIEN
Executed: 2021-04-15
HSU, CHIA-LIN
Executed: 2021-04-21
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
Method for Detecting Environmental Parameter in Semiconductor Fabrication Facility