Patent Assignment
Reel/Frame 056318/0452
Assignment of Assignor's Interest
Recorded: 2021-05-21
Pages: 6
Assignors
ZHAO, JIANPING
Executed: 2021-05-18
VENTZEK, PETER LOWELL GEORGE
Executed: 2021-05-17
IWAO, TOSHIHIKO
Executed: 2021-05-18
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Hard Mask Deposition Using Direct Current Superimposed Radio Frequency Plasma