Patent Assignment
Reel/Frame 056332/0732
Assignment of Assignor's Interest
Recorded: 2021-05-24
Pages: 4
Assignor
LIN, YUN-YUE
Executed: 2019-02-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Pellicle for an Euv Lithography Mask and a Method of Manufacturing Thereof