Patent Assignment
Reel/Frame 056371/0315
Assignment of Assignor's Interest
Recorded: 2021-05-27
Pages: 8
Assignors
BEZEL, ILYA
Executed: 2020-03-06
DERSTINE, MATTHEW
Executed: 2021-05-26
SCHUMAKER, WILLIAM
Executed: 2020-06-05
FRIEDMANN, MICHAEL
Executed: 2020-03-05
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Pumping Laser Sustained Plasma with Interlaced Pulsed Illumination Sources