Patent Assignment
Reel/Frame 056424/0928
Assignment of Assignor's Interest
Recorded: 2021-06-03
Pages: 8
Assignors
PERNU, TAPIO
Executed: 2021-03-09
KYYNÄRÄINEN, JUKKA
Executed: 2021-03-01
SAARILAHTI, JAAKKO
Executed: 2021-03-01
Assignee
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
TEKNIIKANTIE 21, ESPOO, 02150, FINLAND
Covered Property
(1)
Microelectromechanical Capacitive Pressure Sensor Having a Valve Portion Being Operable to Close First Output and Open Second Output to Equalize Pressure