Microelectromechanical capacitive pressure sensor having a valve portion being operable to close first output and open second output to equalize pressure

1. A MEMS pressure sensor, comprising:

a sensor portion comprising a deformable membrane and a first volume, and

a valve portion comprising a first output to a first side of the pressure sensor and a second output to a second side of the pressure sensor, wherein the valve portion is operable to:

close the second output and open the first output to equalize pressure in the first volume with pressure at the first side of the pressure sensor for calibrating the pressure sensor; and

close the first output and open the second output to equalize pressure in the first volume with pressure at the second side of the pressure sensor for pressure measurement,

wherein the pressure sensor is configured to provide a first signal indicative of capacitance or resistance change associated with the deformable membrane of the pressure sensor after opening the first output and closing the second output and to provide a second signal indicative of capacitance or resistance change associated with the deformable membrane after closing the first output and opening the second output.

2. The MEMS pressure sensor according to claim 1 , wherein the valve portion comprises a second volume connected to the first volume, a first membrane comprising the first output, a second membrane comprising at least part of the second output, and a third membrane positioned in the second volume and between the first membrane and the second membrane, wherein the third membrane is adjustable to close the first output for the pressure measurement and the third membrane is adjustable to close the second output for offset nulling.

3. The MEMS pressure sensor according to claim 2 , wherein the pressure sensor is configured to adjust the third membrane to close the first output by applying a first voltage between the first membrane and the third membrane and the pressure sensor is configured to adjust the third membrane to close the second output by applying a second voltage between the second membrane and the third membrane.

4. The MEMS pressure sensor according to claim 3 , wherein the pressure sensor is a capacitive pressure sensor and comprises a first electrode in the first volume and a second electrode forming or comprising the deformable membrane.

5. The MEMS pressure sensor according to claim 4 , further comprising a third electrode, wherein the electrodes are electrically insulated from each other, the second electrode is positioned between the first electrode and the third electrode, and the third electrode is configured to let the pressure at the first side of the pressure sensor to affect the deformable membrane.

6. The MEMS pressure sensor according to claim 2 , wherein the pressure sensor is a capacitive pressure sensor and comprises a first electrode in the first volume and a second electrode forming or comprising the deformable membrane.

7. The MEMS pressure sensor according to claim 6 , further comprising a third electrode, wherein the electrodes are electrically insulated from each other, the second electrode is positioned between the first electrode and the third electrode, and the third electrode is configured to let the pressure at the first side of the pressure sensor to affect the deformable membrane.

8. The MEMS pressure sensor according to claim 2 , wherein the pressure sensor is a piezoresistive pressure sensor and comprises at least one piezoresistive diaphragm on the deformable membrane or comprising the deformable membrane.

9. The MEMS pressure sensor according to claim 1 , wherein the pressure sensor is a capacitive pressure sensor and comprises a first electrode in the first volume and a second electrode forming or comprising the deformable membrane.

10. The MEMS pressure sensor according to claim 9 , further comprising a third electrode, wherein the electrodes are electrically insulated from each other, the second electrode is positioned between the first electrode and the third electrode, and the third electrode is configured to let the pressure at the first side of the pressure sensor to affect the deformable membrane.

11. The MEMS pressure sensor according to claim 10 , wherein the pressure sensor is configured for detecting pressure difference during the pressure measurement on the basis of capacitance imbalance between a first capacitance between the second electrode and the third electrode and a second capacitance between the second electrode and the first electrode.

12. The MEMS pressure sensor according to claim 1 , wherein the pressure sensor is a piezoresistive pressure sensor and comprises at least one piezoresistive diaphragm on the deformable membrane or comprising the deformable membrane.

13. The MEMS pressure sensor according to claim 12 , wherein the piezoresistive membrane comprises a set of piezoresistors on the deformable membrane, the set of piezoresistors being configured to provide the second signal indicative of change of resistivity upon closing the first output and opening the second output.

14. An apparatus, comprising a MEMS pressure sensor according to claim 1 and control circuitry configured to cause closing the first output and the second output and detecting the pressure difference between the first side and the second side of the pressure sensor.

15. The apparatus of claim 14 , wherein the valve portion of the MEMS pressure sensor comprises a second volume connected to the first volume, a first membrane comprising the first output, a second membrane comprising at least part of the second output, and a third membrane positioned in the second volume and between the first membrane and the second membrane, wherein the third membrane is adjustable to close the first output for the pressure measurement and the third membrane is adjustable to close the second output for offset nulling.

16. The apparatus of claim 15 , wherein the MEMS pressure sensor is configured to adjust the third membrane to close the first output by applying a first voltage between the first membrane and the third membrane and the pressure sensor is configured to adjust the third membrane to close the second output by applying a second voltage between the second membrane and the third membrane.

17. A method for operating a MEMS pressure sensor according to claim 1 , comprising:

directing opening of the first output of the pressure sensor and closing the second output of the pressure sensor for equalizing pressure in the first volume with pressure at the first side of the pressure sensor,

receiving the first signal indicative of capacitance or resistance change associated with the deformable membrane of the pressure sensor after opening the first output and closing the second output,

performing sensor calibration on the basis of the received first signal,

directing closing the first output and opening the second output after the sensor calibration for equalizing pressure in the first volume with pressure at the second side of the pressure sensor,

receiving the second signal indicative of capacitance or resistance change associated with the deformable membrane after closing the first output and opening the second output; and

determining pressure difference between the first side and the second side of the pressure sensor on the basis of the received second signal.

18. The method according to claim 17 , wherein the valve portion of the pressure sensor comprises a second volume connected to the first volume, a first membrane comprising the first output, a second membrane comprising at least part of the second output, and a third membrane positioned in the second volume and between the first membrane and the second membrane, wherein the third membrane is adjustable to close the first output for the pressure measurement and the third membrane is adjustable to close the second output for offset nulling, and wherein the third membrane is directed to close the first output for the pressure measurement and close the second output for offset nulling.

19. The method according to claim 18 , wherein the third membrane is directed to close the first output by applying a first voltage between the first membrane and the third membrane and the third membrane is directed to close the second output by applying a second voltage between the second membrane and the third membrane.

20. A MEMS pressure sensor apparatus, comprising:

a sensor portion comprising a deformable membrane and a first volume, and

a valve portion comprising a first output to a first side of the pressure sensor and a second output to a second side of the pressure sensor, wherein the valve portion is operable to:

close the second output and open the first output to equalize pressure in the first volume with pressure at the first side of the pressure sensor for calibrating the pressure sensor; and

close the first output and open the second output to equalize pressure in the first volume with pressure at the second side of the pressure sensor for pressure measurement,

wherein the valve portion comprises a second volume connected to the first volume, a first membrane comprising the first output, a second membrane comprising at least part of the second output, and a third membrane positioned in the second volume and between the first membrane and the second membrane, wherein the third membrane is adjustable to close the first output for the pressure measurement and the third membrane is adjustable to close the second output for offset nulling.

21. A MEMS pressure sensor apparatus, comprising:

a sensor portion comprising a deformable membrane and a first volume, and

a valve portion comprising a first output to a first side of the pressure sensor and a second output to a second side of the pressure sensor, wherein the valve portion is operable to:

close the second output and open the first output to equalize pressure in the first volume with pressure at the first side of the pressure sensor for calibrating the pressure sensor; and

close the first output and open the second output to equalize pressure in the first volume with pressure at the second side of the pressure sensor for pressure measurement,

wherein the pressure sensor is a capacitive pressure sensor and comprises a first electrode in the first volume, a second electrode forming or comprising the deformable membrane, and a third electrode, wherein the electrodes are electrically insulated from each other, the second electrode is positioned between the first electrode and the third electrode, and the third electrode is configured to let the pressure at the first side of the pressure sensor to affect the deformable membrane.