Patent Assignment
Reel/Frame 056452/0144
Assignment of Assignor's Interest
Recorded: 2021-06-07
Pages: 8
Assignors
JUNG, HWAJUN
Executed: 2021-05-20
SUZUKI, MASAHIRO
Executed: 2021-06-01
HOSAKA, YUKI
Executed: 2021-05-20
OHATA, MITSUNORI
Executed: 2021-05-20
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus