Patent Assignment
Reel/Frame 056457/0725
Assignment of Assignor's Interest
Recorded: 2021-06-07
Pages: 13
Assignors
IKEDA, TARO
Executed: 2021-05-19
TANAKA, SUMI
Executed: 2021-05-20
KAWAKAMI, SATORU
Executed: 2021-05-18
HIRAYAMA, MASAKI
Executed: 2021-05-19
Assignees
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 1076325, JAPAN
TOHOKU UNIVERSITY
2-1-1, KATAHIRA, AOBA-KU, SENDAI-SHI,, MIYAGI, 9808577, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Lower Stage