Patent Assignment
Reel/Frame 056465/0402
Assignment of Assignor's Interest
Recorded: 2021-06-08
Pages: 6
Assignors
CHEN, PO-JU
Executed: 2021-03-31
CHAO, CHA-HSIN
Executed: 2021-04-09
LIAO, CHIH-TENG
Executed: 2021-05-23
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Laser Array System for Improved Local Cd Uniformity