Patent Assignment
Reel/Frame 056490/0325
Assignment of Assignor's Interest
Recorded: 2021-06-09
Pages: 5
Assignors
HISAMATSU, TORU
Executed: 2021-05-31
KATSUNUMA, TAKAYUKI
Executed: 2021-05-31
ISHIKAWA, SHINYA
Executed: 2021-05-31
KIHARA, YOSHIHIDE
Executed: 2021-05-31
HONDA, MASANOBU
Executed: 2021-05-31
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing System