Patent Assignment
Reel/Frame 056534/0571
Assignment of Assignor's Interest
Recorded: 2021-06-14
Pages: 3
Assignee
SHINKO ELECTRIC INDUSTRIES CO., LTD.
80, OSHIMADA-MACHI, NAGANO-SHI, NAGANO, 381-2287, JAPAN
Covered Property
(1)
Substrate Fixing Device, Electrostatic Chuck, and Method of Manufacturing Electrostatic Chuck