Patent Assignment
Reel/Frame 056748/0164
Assignment of Assignor's Interest
Recorded: 2021-07-02
Pages: 4
Assignors
HOU, TE-CHIEN
Executed: 2020-10-20
NIEN, PO-CHIN
Executed: 2020-10-20
CHEN, CHIH HUNG
Executed: 2020-10-20
CHEN, YING-TSUNG
Executed: 2020-10-20
CHEN, KEI-WEI
Executed: 2020-10-20
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
System and Method for Removing Impurities During Chemical Mechanical Planarization