Patent Assignment
Reel/Frame 056779/0858
Assignment of Assignor's Interest
Recorded: 2021-07-07
Pages: 3
Assignors
SU, YI-NIEN
Executed: 2021-04-23
CHEN, YU-YU
Executed: 2021-07-06
HUANG, KUAN-WEI
Executed: 2021-04-23
CHEN, LI-MIN
Executed: 2021-04-20
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Air Spacer Surrounding Conductive Features and Method Forming Same