Patent Assignment
Reel/Frame 056848/0386
Assignment of Assignor's Interest
Recorded: 2021-07-14
Pages: 6
Assignors
MUN, JEONGIL
Executed: 2021-07-06
PARK, JINYOUNG
Executed: 2021-07-01
SUN, JONGWOO
Executed: 2021-07-06
LEE, HYUNGJOO
Executed: 2021-07-06
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Semiconductor Processing Equipment Including Electrostatic Chuck for Plasma Processing