Patent Assignment
Reel/Frame 056939/0899
Assignment of Assignor's Interest
Recorded: 2021-07-21
Pages: 3
Assignors
SHOEB, JULINE
Executed: 2021-06-03
PATERSON, ALEXANDER MILLER
Executed: 2021-07-01
WU, YING
Executed: 2021-07-12
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Etching Isolation Features and Dense Features Within a Substrate