Patent Assignment
Reel/Frame 056943/0535
Assignment of Assignor's Interest
Recorded: 2021-07-22
Pages: 3
Assignee
KOJUNDO CHEMICAL LABORATORY CO., LTD.
1-28, CHIYODA 5-CHOME, SAKADO-SHI, SAITAMA, 350-0284, JAPAN
Covered Property
(1)
Solid Vaporization/Supply System of Metal Halide for Thin Film Deposition