Patent Assignment
Reel/Frame 056952/0819
Assignment of Assignor's Interest
Recorded: 2021-07-22
Pages: 3
Assignor
KASAI, SHIGERU
Executed: 2021-07-15
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Heater Temperature Control Method, Heater, and Placement Stand