Granted Patent B2

US 12,356,508 · App. 17/425,285 · Granted Jul 8, 2025

Inventor: Shigeru Kasai (Yamanashi, JP)

Assignee: Tokyo Electron Limited

H05B3/03H01L21/02H05B3/74H05B2213/07

Abstract

Claims (11)

1. A method of controlling a temperature of a heater that includes a single plate-shaped member formed of a semiconductor substrate, and a set of three or more electrodes formed on a side surface of the single plate-shaped member while being spaced apart from each other in a circumference direction, wherein the single plate-shaped member is divided into a plurality of concentric regions that include a first concentric region and a second concentric region that surrounds the first concentric region, the method comprising:

heating the first concentric region of the single plate-shaped member by sequentially driving each of a plurality of first sets of conducting electrodes that are associated with the first concentric region where each first set of conducting electrodes conducts conducting current between conducting electrodes included in the first set, the plurality of first sets of conducting electrodes from the set of three or more electrodes and each of the plurality of first sets of conducting electrodes having a first number of conducting, and

heating the second concentric region by sequentially driving each of a plurality of second sets of conducting electrodes that are associated with the second concentric region where each second set of conducting electrodes conducts current between conducting electrodes included in the second set, the plurality of second sets of conducting electrodes from the set of three or more electrodes and each of the plurality of second sets of conducting electrodes having a second number of conducting electrodes that is different from the first number of conducting electrodes,

wherein a first conducting time period for conducting the current between the conducting electrodes included in the plurality of first sets of conducting electrodes is set and a second conducting time period for conducting the current between the conducting electrodes included in the plurality of second sets of conducting electrodes is set.

2. The method of claim 1 , wherein the first conducting time period is set based on a distance between the conducting electrodes included in the plurality of first sets of conducting electrodes or an electrical resistance value between the conducting electrodes included in the plurality of first sets of conducting electrodes.

3. The method of claim 1 , wherein each of said three or more electrodes is divided in the circumferential direction into large-size electrodes and a small-size electrode that has a circumferential width smaller than those of the large-size electrodes, and

when the current is conducted in said heating of the first concentric region, the current is conducted between a small-size electrode of one of the conducting electrodes of the first set of conducting electrodes and a small-size electrode/large-size electrodes of another conducting electrode of the first set of conducting electrodes, and the current is not conducted between large-size electrodes of said one of the conducting electrodes of the first set of conducting electrodes and the large-size electrodes of said another conducting electrode of the first set of conducting electrodes.

4. The method of claim 1 , further comprising:

measuring a temperature of the single plate-shaped member based on an electrical resistance value when the current is conducted between conducting electrodes included in the plurality of first sets of conducting electrodes and current is conducted between conducting electrodes included in the plurality of second sets of conducting electrodes.

5. The method of claim 4 , further comprising:

adjusting at least one of the first conducting time period and the second conducting time period based on a measurement result obtained in said measuring.

Assignments (1)

Priority Claims (1)

Continuity (1)

References Cited (12)