Patent Assignment
Reel/Frame 056956/0284
Assignment of Assignor's Interest
Recorded: 2021-07-23
Pages: 5
Assignor
LIANG, ZHENKANG MAX
Executed: 2021-07-17
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.