Patent Assignment
Reel/Frame 057071/0428
Assignment of Assignor's Interest
Recorded: 2021-08-03
Pages: 4
Assignors
DOI, KENTA
Executed: 2021-05-26
SAKUISHI, TOSHIYUKI
Executed: 2021-05-26
NAKAMURA, TOSHIYUKI
Executed: 2021-05-26
MORIKAWA, YASUHIRO
Executed: 2021-05-26
Assignee
ULVAC, INC.
2500, HAGISONO, CHIGASAKI-SHI, KANAGAWA, 253-8543, JAPAN
Covered Property
(1)
Silicon Dry Etching Method