Patent Assignment
Reel/Frame 057096/0918
Assignment of Assignor's Interest
Recorded: 2021-08-05
Pages: 4
Assignors
TSAI, WEI-YU
Executed: 2019-09-25
NIEN, FU-YAO
Executed: 2019-09-25
HUANG, HONG-WEI
Executed: 2019-09-25
LEE, CHANG-SHENG
Executed: 2019-09-25
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Radical Etching in Gate Formation