Patent Assignment
Reel/Frame 057137/0173
Assignment of Assignor's Interest
Recorded: 2021-08-10
Pages: 4
Assignors
SIMS, JAMES S.
Executed: 2019-11-12
TANG, SHANE
Executed: 2019-11-11
RAI, VIKRANT
Executed: 2019-11-11
MCKERROW, ANDREW
Executed: 2019-11-12
QIU, HUATAN
Executed: 2019-11-11
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method of Depositing Silicon Nitride Films