Patent Assignment
Reel/Frame 057314/0178
Assignment of Assignor's Interest
Recorded: 2021-08-27
Pages: 4
Assignors
CUI, JI
Executed: 2021-07-12
CHEN, CHIH HUNG
Executed: 2021-07-13
CHEN, LIANG-GUANG
Executed: 2021-07-12
CHEN, KEI-WEI
Executed: 2021-07-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Semiconductor Processing Tool and Methods of Operation