Patent Assignment
Reel/Frame 057319/0377
Assignment of Assignor's Interest
Recorded: 2021-08-27
Pages: 3
Assignor
LIN, YUN-YUE
Executed: 2020-12-25
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Pellicle for an Euv Lithography Mask and a Method of Manufacturing Thereof