Patent Assignment
Reel/Frame 057363/0235
Assignment of Assignor's Interest
Recorded: 2021-08-30
Pages: 5
Assignors
LEE, HSIN-CHANG
Executed: 2019-01-04
HSU, PEI-CHENG
Executed: 2019-01-04
LIEN, TA-CHENG
Executed: 2019-01-04
WANG, TZU YI
Executed: 2019-01-04
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Manufacturing Euv Photo Masks