Patent Assignment
Reel/Frame 057374/0961
Assignment of Assignor's Interest
Recorded: 2021-09-02
Pages: 4
Assignors
YANG, SHENG-CHUN
Executed: 2020-12-09
HUANG, PO-CHIH
Executed: 2020-12-09
CHENG, CHIH-LUNG
Executed: 2020-12-31
LIN, YI-MING
Executed: 2020-12-10
LIAO, CHEN-HAO
Executed: 2020-12-11
CHUNG, MIN-CHENG
Executed: 2020-12-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Systems and Methods for Processing a Substrate