Systems and methods for processing a substrate
A system and method for generating a gas curtain over an access port of a processing chamber for a semiconductor substrate. A gas flow stabilizer and a gas flow receiver, each including a horizontal flow section and a vertical flow section cooperate to generate a gas curtain that impedes gas, e.g., oxygen, from outside the processing chamber, from flowing into the chamber, for example, when the access port is opened to add/or to remove a workpiece from the processing chamber.
1. A system, comprising:
a substrate staging module including a wall, the wall having an access port;
a gas flow stabilizer proximate to a first side of the access port, the gas flow stabilizer including a horizontal flow section and a vertical flow section, the horizontal flow section of the gas flow stabilizer overlying the vertical flow section of the gas flow stabilizer, the horizontal flow section of the gas flow stabilizer including a plurality of overlapping horizontal gas flow paths and the vertical flow section of the gas flow stabilizer including a plurality of vertical gas flow paths; and
a gas flow receiver proximate to a second side of the access port, the gas flow receiver including a vertical flow section and a horizontal flow section, the vertical flow section of the gas flow receiver overlying the horizontal flow section of the gas flow receiver, the vertical flow section of the gas flow receiver including a plurality of vertical gas flow paths, and the horizontal flow section of the gas flow receiver including a plurality of overlapping horizontal gas flow paths,
wherein each of the plurality of overlapping horizontal gas flow paths in the gas flow stabilizer is opposite in horizontal direction to a preceding horizontal gas flow path.
2. The system of claim 1 , wherein the plurality of overlapping horizontal gas flow paths of the gas flow stabilizer are defined between a plurality of overlapping horizontal plates.
3. The system of claim 1 , wherein the plurality of vertical gas flow paths of the gas flow stabilizer are defined between a plurality of vertical plates.
4. The system of claim 3 , wherein at least two pairs of the plurality of vertical plates are spaced apart unequally.
5. The system of claim 1 , wherein the plurality of vertical gas flow paths of the gas flow receiver are defined by a plurality of vertical conduits.
6. The system of claim 5 , wherein the vertical conduits have a round cross-section.
7. The system of claim 1 , further comprising a plurality of gas inlets coupled to the horizontal flow section of the gas flow stabilizer, the plurality of gas inlets being in fluid communication with the gas flow stabilizer.
8. The system of claim 1 , further comprising a source of a vacuum in fluid communication with the gas flow receiver.
9. The system of claim 4 , wherein plurality of vertical plates are spaced apart at least 2 mm.
10. The system of claim 1 , wherein each of the plurality of overlapping horizontal gas flow paths in the gas flow receiver is opposite in horizontal direction to a preceding horizontal gas flow path.
11. The system of claim 1 , wherein the gas flow receiver is equipped with vertical conduits having a round cross-section and a diameter of about 2 mm.
12. The system of claim 7 , wherein the plurality of gas inlets are in fluid communication with a source of gas.
13. The system of claim 1 , wherein the vertical flow section of the gas flow receiver is equipped with a plurality of conduits arranged in rows, each row including a plurality of vertical conduits, with the position of the vertical conduits of adjacent rows being offset from each other.
14. A system, comprising:
a substrate staging module including a wall with an access port;
a gas flow stabilizer included above the access port and coupled to a surface of the wall interior to the substrate staging module, the gas flow stabilizer including a horizontal flow section and a vertical flow section, the horizontal flow section of the gas flow stabilizer overlying the vertical flow section of the gas flow stabilizer, the horizontal flow section of the gas flow stabilizer including a plurality of horizontal gas flow paths and the vertical flow section of the gas flow stabilizer including a plurality of vertical gas flow paths, wherein the plurality of horizontal gas flow paths is serpentine; and
a gas flow receiver included below the access port and coupled to the surface of the wall interior to the substrate staging module, the gas flow receiver including a vertical flow section and a horizontal flow section, the vertical flow section of the gas flow receiver overlying the horizontal flow section of the gas flow receiver, the vertical flow section of the gas flow receiver including a plurality of vertical gas flow paths, and the horizontal flow section of the gas flow receiver including a plurality of horizontal gas flow paths.
15. The system of claim 14 , wherein the plurality of horizontal gas flow paths of the gas flow stabilizer are defined between a plurality of horizontal plates.
16. The system of claim 14 , wherein the plurality of vertical gas flow paths of the gas flow stabilizer are defined between a plurality of vertical plates.
17. The system of claim 14 , wherein the plurality of vertical gas flow paths of the gas flow receiver are defined by a plurality of vertical conduits that have a round cross-section.
18. A system, comprising:
a substrate staging module including a wall, the wall having an access port;
a gas flow stabilizer proximate to a first side of the access port and coupled to the wall, the gas flow stabilizer including a horizontal flow section and a vertical flow section, the horizontal flow section of the gas flow stabilizer overlying the vertical flow section of the gas flow stabilizer, the horizontal flow section of the gas flow stabilizer including a plurality of overlapping horizontal gas flow paths and the vertical flow section of the gas flow stabilizer including a plurality of vertical gas flow paths, wherein the plurality of overlapping horizontal gas flow paths of the gas flow stabilizer are defined between a plurality of overlapping horizontal plates, and the plurality of vertical gas flow paths of the gas flow stabilizer are defined between a plurality of vertical plates; and
a gas flow receiver proximate to a second side of the access port and coupled to the wall, the gas flow receiver including a vertical flow section and a horizontal flow section, the vertical flow section of the gas flow receiver overlying the horizontal flow section of the gas flow receiver, the vertical flow section of the gas flow receiver including a plurality of vertical gas flow paths, and the horizontal flow section of the gas flow receiver including a plurality of overlapping horizontal gas flow paths.
19. The system of claim 18 , wherein at least two pairs of the plurality of vertical plates are spaced apart unequally.
20. The system of claim 18 , wherein the plurality of vertical gas flow paths of the gas flow receiver are defined by a plurality of vertical conduits.