Patent Assignment
Reel/Frame 057385/0602
Assignment of Assignor's Interest
Recorded: 2021-09-03
Pages: 3
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Diffraction Pattern Guided Source Mask Optimization