Patent Assignment
Reel/Frame 057409/0965
Assignment of Assignor's Interest
Recorded: 2021-09-08
Pages: 6
Assignors
CHEN, XI
Executed: 2021-08-04
RAO, SHREESHA YOGISH
Executed: 2021-09-03
GUO, SHENG
Executed: 2021-09-03
CHING, CHI H.
Executed: 2021-08-11
BREZOCZKY, THOMAS BLASIUS
Executed: 2021-08-18
TSAI, CHENG-HSIUNG
Executed: 2021-08-11
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Reactive Cleaning of Substrate Support