Patent Assignment
Reel/Frame 057415/0192
Assignment of Assignor's Interest
Recorded: 2021-09-08
Pages: 8
Assignors
AZUMO, SHUJI
Executed: 2021-09-01
IKE, SHINICHI
Executed: 2021-08-31
KAWANO, YUMIKO
Executed: 2021-08-31
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Film Formation Method and Film Formation Device