Patent Assignment
Reel/Frame 057427/0369
Assignment of Assignor's Interest
Recorded: 2021-09-09
Pages: 6
Assignors
OTANI, YUKO
Executed: 2021-08-20
AOKI, KAZUO
Executed: 2021-08-18
MATSUMOTO, SHUNICHI
Executed: 2021-08-18
URANO, YUTA
Executed: 2021-08-18
Assignee
HITACHI HIGH-TECH CORPORATION
17-1, TORANOMON 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Defect Detection Device, Defect Detection Method, and Defect Observation Apparatus Including Defect Detection Device