Patent Assignment
Reel/Frame 057503/0056
Assignment of Assignor's Interest
Recorded: 2021-09-16
Pages: 3
Assignor
BLAESING-BANGERT, CAROLA
Executed: 2021-08-24
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Device and Method for Determining Placements of Pattern Elements of a Reflective Photolithographic Mask in the Operating Environment Thereof