Patent Assignment
Reel/Frame 057538/0440
Assignment of Assignor's Interest
Recorded: 2021-09-17
Pages: 2
Assignors
ZHAO, PUSHE
Executed: 2021-08-23
OHMORI, TAKESHI
Executed: 2021-08-30
OKUYAMA, YUTAKA
Executed: 2021-08-30
Assignee
HITACHI HIGH-TECH CORPORATION
17-1, TORANOMON 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Dimension Measurement Apparatus, Semiconductor Manufacturing Apparatus, and Semiconductor Device Manufacturing System