Patent Assignment
Reel/Frame 057545/0506
Assignment of Assignor's Interest
Recorded: 2021-09-21
Pages: 3
Assignors
SU, YU-CHUNG
Executed: 2021-05-04
KO, TSUNG-HAN
Executed: 2021-05-07
CHANG, CHING-YU
Executed: 2021-04-23
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Forming Photoresist Pattern