Patent Assignment
Reel/Frame 057566/0092
Assignment of Assignor's Interest
Recorded: 2021-09-22
Pages: 5
Assignors
WU, XUSHENG
Executed: 2021-05-19
LIU, CHANG-MIAO
Executed: 2020-07-21
SHANG, HUILING
Executed: 2020-07-23
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Isolation Structures In Multi-Gate Semiconductor Devices And Methods Of Fabricating The Same