Patent Assignment
Reel/Frame 057567/0649
Assignment of Assignor's Interest
Recorded: 2021-09-22
Pages: 6
Assignors
KIM, KYUHO
Executed: 2021-06-18
KIM, NAM KYUN
Executed: 2021-06-18
ANN, SUNGJUN
Executed: 2021-06-18
CHOI, MYUNGSUN
Executed: 2021-06-18
SUNG, DOUGYONG
Executed: 2021-06-18
SHIM, SEUNGBO
Executed: 2021-06-18
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Plasma Etching Apparatus, Plasma Etching Method, and Semiconductor Device Fabrication Method Including the Plasma Etching Method