Patent Assignment
Reel/Frame 057573/0693
Assignment of Assignor's Interest
Recorded: 2021-09-23
Pages: 4
Assignors
HENRI, JON
Executed: 2020-03-24
COLINJIVADI, KARTHIK S.
Executed: 2020-03-24
ROBERTS, FRANCIS SLOAN
Executed: 2020-03-24
REDDY, KAPU SIRISH
Executed: 2020-05-14
TAN, SAMANTHA SIAMHWA
Executed: 2020-03-24
LEE, SHIH-KED
Executed: 2020-04-08
HUDSON, ERIC
Executed: 2020-03-24
SCHROEDER, TODD
Executed: 2020-03-31
YANG, JIALING
Executed: 2020-03-26
ZHENG, HUIFENG
Executed: 2020-03-24
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Carbon Based Depositions Used for Critical Dimension Control During High Aspect Ratio Feature Etches and for Forming Protective Layers