Patent Assignment
Reel/Frame 057589/0481
Assignment of Assignor's Interest
Recorded: 2021-09-23
Pages: 3
Assignee
ASML HOLDING N.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology System, Lithographic Apparatus, and Calibration Method