Patent Assignment
Reel/Frame 057590/0958
Assignment of Assignor's Interest
Recorded: 2021-09-24
Pages: 10
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Method and Apparatus for Selective Film Formation in Semiconductor Substrate Processing