Patent Assignment
Reel/Frame 057688/0143
Assignment of Assignor's Interest
Recorded: 2021-09-30
Pages: 3
Assignor
REBSTOCK, LUTZ
Executed: 2018-04-03
Assignee
BROOKS AUTOMATION (GERMANY) GMBH
ERNST-RUSKA-RING 11, JENA, 07745, GERMANY
Covered Property
(1)
Humidity Control in Semiconductor Systems
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 9, 2021
From: BROOKS AUTOMATION,INC
To: BROOKS AUTOMATION HOLDING, LLC
Reel/Frame 058481/0740 →
Assignment of Assignor's Interest
Dec 9, 2021
From: BROOKS AUTOMATION HOLDING, LLC
To: BROOKS AUTOMATION US, LLC
Reel/Frame 058482/0001 →
Submission Is to Correct an Error Made in a Previously Recorded Document That Erroneously Affects the Identified Application(S), or Patent(S).
Jan 19, 2022
From: BROOKS AUTOMATION (GERMANY) GMBH
To: BROOKS AUTOMATION (GERMANY) GMBH
Reel/Frame 058771/0795 →