Patent Assignment
Reel/Frame 057702/0665
Assignment of Assignor's Interest
Recorded: 2021-10-05
Pages: 4
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method and System for Forming Silicon Nitride on a Sidewall of a Feature