Granted Patent B2

US 12,550,644 · App. 17/449,670 · Granted Feb 10, 2026

Inventors: Tomohiro Kubota (Hachioji, JP); Shinya Ueda (Hachioji, JP)

Assignee: ASM IP Holding B.V.

H01L21/0217H01L21/02164H01L21/02211H01L21/02274H01L21/0228H01L21/0234H01L21/31111H01L21/31116

Abstract

Claims (29)

1 . A method of forming silicon nitride on a sidewall of a feature, the method comprising the steps of:

providing a substrate, the substrate comprising a feature comprising a sidewall surface and a surface adjacent the sidewall surface;

forming a silicon oxide layer overlying the sidewall surface and the surface adjacent the sidewall surface;

using a cyclical deposition process, depositing a silicon nitride layer overlying the silicon oxide layer;

generating activated species from a hydrogen-containing gas;

exposing the silicon nitride layer to the activated species generated from a hydrogen-containing gas; and

using a selective etch process, selectively removing the silicon nitride layer and the silicon oxide layer from the horizontal surfaces,

wherein the activated species preferentially interact with the silicon nitride layer on horizontal surfaces relative to the sidewall surface.

2 . The method of claim 1 , wherein the silicon oxide layer comprises nitrogen.

3 . The method of claim 1 , wherein the cyclical deposition process comprises:

providing a silicon precursor; and

providing a nitrogen reactant.

4 . The method of claim 3 , wherein the silicon precursor comprises one or more of alkylaminosilanes, aminosilanes, halosilanes.

5 . The method of claim 3 , wherein the silicon precursor comprises one or more of bisdiethylaminosilane (BDEAS), bisdimethylaminosilane (BDMAS), hexylethylaminosilane (HEAD), tetraethylaminosilane (TEAS), tert-butylaminosilane (TBAS), bistert-butylaminosilane (BTBAS), bisdimethylaminodimethylaminosilane (BDMADMS), heptamethyldisilazane (HMDS), trimethysylydiethylamine (TMSDEA), trimethylsyledimethlamine (TMSDMA), trimethyltoribinylcycletrisilazane (TMTVCTS), tristrimethylhydroxyamine (TTMSHA), bisdimethylaminomethysilane (BDMAMS), and dimethylsilylydimethylaminedimetyhlsilyldimethlamine (DMSDMA), silane, SiXH 3 or SiX 2 H 2 or SiX 3 H or SiX 4 where X is one of Cl, Br, I, XH 2 Si—SiXH 2 or X 2 HSi—SiX 2 H or X 3 Si—SiX 3 where X is one of Cl, Br, I.

6 . The method of claim 3 , wherein the nitrogen reactant comprises one or more of nitrogen and ammonia.

7 . The method of claim 3 , wherein a reactant gas comprises the nitrogen reactant and an inert gas comprising one or more of argon and helium.

8 . The method of claim 1 , wherein the cyclical deposition process comprises a plasma-enhanced cyclical deposition process.

9 . The method of claim 8 , wherein a power provided to produce a plasma during the step of generating activated species from a hydrogen-containing gas is between about 300 W and about 2000 W.

10 . The method of claim 1 , wherein the hydrogen-containing gas comprises hydrogen and an inert gas comprising one or more of nitrogen, argon, and helium.

11 . The method of claim 1 , wherein the step of selectively removing comprises using a wet etch process.

12 . The method of claim 1 , wherein the step of selectively removing comprises using a dry etch process.

13 . The method of claim 1 , wherein a thickness of the silicon oxide layer is greater than 1.5 nm and less than 5 nm.

14 . The method of claim 1 , wherein the substrate comprises silicon.

15 . The method of claim 1 , wherein the step of generating activated species from a hydrogen-containing gas comprises using a direct plasma.

16 . The method of claim 15 , wherein a power provided to produce the direct plasma is between about 500 W and about 2000 W.

17 . The method of claim 1 , wherein a temperature during the step of depositing a silicon nitride layer process is between about 300° C. and about 550° C.

18 . The method of claim 1 , wherein a pressure during the step of depositing a silicon nitride layer is between about 200 Pa and about 6000 Pa.

19 . The method of claim 1 , wherein a pressure during the step of exposing the silicon nitride layer to activated species is between about 100 Pa and about 500 Pa.

20 . The method of claim 1 , further comprising a stabilization period prior to the step of exposing the silicon nitride layer to the activated species generated from a hydrogen-containing gas.

Assignments (1)

Continuity (2)

References Cited (400)